Rotary drive device and a robot arm of a robot equipped therewith

ABSTRACT

A rotary drive device has a fluid-actuated rotary drive, which has a drive housing and a drive unit rotatable relative thereto. The drive unit has a pivot piston and a drive shaft connected thereto, whereby the drive shaft projects from the drive housing on an axial front side with a drive section. On the rear side, several components are mounted in axial succession on the drive housing of the rotary drive, which together with the rotary drive form a uniformly practicable drive assembly. These components include a valve carrier device carrying a control valve arrangement, a pneumatic connection unit, and an electronic control unit electrically connected to the control valve arrangement. A robot arm is also proposed, which includes the rotary drive device as an arm joint.

BACKGROUND OF THE INVENTION

The invention relates to a rotary drive device comprising afluid-actuated rotary drive, which has a drive housing and a drive unitrotatable relative thereto about a main axis of the rotary drive by acontrolled fluid application of at least one pivot piston arranged inthe drive housing, wherein a drive shaft of the drive unit connected tothe pivot piston projects from the drive housing at an axial front sideof drive housing with a drive section enabling a force output, and witha control valve arrangement comprising at least one electricallyactuatable control valve, which is fluidically connected via a controlfluid channel system to two drive chambers of the rotary drive separatedfrom one another by the pivot piston in the drive housing, and which isdesigned to control the fluid pressurization of the two drive chambersfor rotation and rotative positioning of the drive unit relative to thedrive housing.

The invention further relates to a robot arm of a robot which has atleast two arm members which are connected with one another in apivotable manner relative to one another by means of an arm joint.

A rotary drive device designed in the aforementioned manner is knownfrom DE 20 2008 003 944 U1. It comprises a fluid-operated rotary drive,which has a drive housing and a drive unit rotatable relative to thedrive housing. The drive unit comprises a drive shaft projecting fromthe front of the drive housing and two pivot pistons non-rotatablyconnected to the drive shaft in the interior of the drive housing, eachdividing two drive chambers from one another. The drive chambers areconnected to a control valve arrangement via a control fluid channelsystem formed by fluid hoses and can be supplied with compressed air tobe controlled by electrical actuation of the control valve arrangementsuch that a rotational movement of the drive unit relative to the drivehousing can be produced.

From DE 39 41 255 C2, a rotary drive device is also known in which thedrive shaft of the fluid-operated rotary drive is however combined withonly a single pivot piston to form a drive unit.

DE 10 2010 013 617 B4 discloses a robot of a modular design, which has amovable robot arm which is equipped with at least one arm jointinterconnecting two arm members which are movable relative to oneanother. The arm joint is formed by a rotary drive device comprising anelectrically actuatable rotary drive.

SUMMARY OF THE INVENTION

The invention has for its object to provide a compact rotary drivedevice with a weight-saving construction, which is particularly suitablefor the realisation of at least one robot arm having an arm joint.

To solve this problem it is provided with a rotary drive device inconjunction with the features mentioned above, that the rotary drive isformed as part of a drive assembly that can be handled as a single unitwhich comprises, in addition to the rotary drive, at least the followingcomponents arranged in axial succession on the axial rear side of thedrive housing opposite the axial front side:

-   -   a valve carrier device carrying the control valve arrangement,    -   a pneumatic connection unit, which has in an externally        accessible manner an aeration connection connectable or        connected to an external pressure source and an deaeration        connection connectable or connected to a pressure sink, wherein        the control valve arrangement is connected both to the aeration        connection and to the deaeration connection, and    -   an electronic control unit connected electronically with the        control valve arrangement for the electrical control thereof.

A robot arm of a robot according to the invention comprises at least onearm joint connecting two arm members in a pivotable manner relative toone another, which is formed by a rotary drive device designed in theaforementioned manner, whereby the drive section of the drive shaft andthe drive housing of the fluid-operated rotary drive each have amounting interface for mounting one of the arm members of the robot arm.

In this way, a rotary drive device exists, which has a drive assemblygroup of a modular design that can be handled as a single unit, in whichseveral functionally relevant components are concatenated and attachedto one another consecutively in the axial direction of the main axis ofthe rotary drive. The drive assembly comprises as a main component afluid-operated rotary drive with a drive housing and a drive unitrotatable and rotatively positionable relative thereto by controlledfluid admission flow. While a drive section of a drive shaft of thedrive unit, which enables force engagement, projects on an axial frontside of the drive unit, at least one valve carrier device carrying acontrol valve arrangement, one pneumatic connection unit and oneelectronic control unit are arranged in axial succession on the axialrear side of the drive housing.

The valve carrier device carries the control valve arrangement requiredfor the control of the rotary drive which is connected via a controlfluid channel system with the drive chambers of the rotary driveseparated from one another by a pivot piston. The pneumatic connectionunit defines the interfaces for the supply and the discharge of thefluidic pressure medium used for the actuation of the rotary drive,which is in particular compressed air, and is equipped for this purposewith an aeration connection and with a deaeration connection. Theseconnections are in particular designed so that they allow the detachableconnection of each fluid line. The term “pneumatic” in the pneumaticconnection unit is to be understood as representative of use with anytype of pressurised fluid and is not limited to compressed air.Internally in the drive assembly, the aeration connection and thedeaeration connection are connected to the control valve arrangement.The control valve arrangement is electrically coupled to the electroniccontrol unit, which generates the control signals required for operationof the control valve arrangement. All components are combined to form aparticularly self-supporting drive assembly, resulting in a compact andweight-saving unit. The axial modular juxtaposition of the individualcomponents of the drive assembly also ensures a narrow design transverseto the main axis of the rotary drive.

Advantageous further developments of the invention are described in thedependent claims.

Preferably, the pneumatic connection unit is arranged axially betweenthe drive housing and the valve carrier device. However, a reversedorder is also possible. In any case, it is advantageous if theelectronic control unit forms the rear side end of the drive assembly,so that it is very easily accessible for connection measures.

The valve carrier device is expediently fixed by means of fixing screwsto the drive housing. These fixing screws preferably also penetrate thepneumatic connection unit, which is thus also fixed.

The electronic control unit is expediently arranged on the rear side ofthe valve carrier device which is axially opposite the drive housing. Itis expediently attached to the valve carrier device independently of thedrive housing, so that it can be easily removed, for example for repairpurposes, without having to detach the valve carrier device from thedrive housing.

In a preferred embodiment, the valve carrier device has a channel platewhich is aligned such that its panel plane is oriented perpendicular tothe main axis of the rotary drive. This channel plate is arranged in theregion of the axial rear side of the drive housing. The control fluidchannel system passes through the channel plate, expediently at leastpartially in its panel plane, whereby the control valve arrangement isattached to the channel plate and communicates with the control fluidchannel extending in the channel plate. The supply and discharge of thefluidic pressure medium required for the actuation of the drive unit,which is preferably compressed air, thus takes place through the channelplate.

The channel plate is expediently designed in several parts and has twochannel plate bodies, each designed to be plate-shaped, which areattached to each other in a joining plane perpendicular to the mainaxis. In the region of this joining plane, a component of the controlfluid channel system is realised by groove-like recesses formed in oneor both channel plate bodies. The groove-like recesses can be veryeasily formed as grooves during the production of the plate-shapedchannel plate bodies, so that very complex channel courses can berealised in favour of a space-saving design.

The valve carrier device preferably also contains a plurality of valvehousing cups, which are fastened with a first axial end section on theend face of an edge section of the channel plate radially surpassing thedrive housing, which axially faces the drive housing, and which eachinclude at least one control valve of the control valve arrangement. Forexample, each valve housing cup may contain only a single control valveor two control valves arranged side by side. Each valve housing cupextends in a finger-like manner starting from the channel plate andfreely ending in the direction of the axial front side of the drivehousing, in particular in the region of the peripheral outercircumferential surface of the drive housing which faces radiallyoutward.

On the edge side of the channel plate, a plurality of valve housing cupsare preferably arranged distributed around the main axis of the rotarydrive. Each valve housing cup expediently features a circular arc-shapedcross section, the concave side of which faces the main axis of therotary drive.

Each valve housing cup is preferably formed in one piece. It isadvantageous if each valve housing cup has, at its second axial endsection, which is axially opposite the channel plate, a cup base with atleast one aperture through which the electrical connection required forthe drive takes place with the respective control valve. Preferably, acircuit board is attached to the outside of the cup base, with whicheach control valve arranged in the valve housing cup is electricallycontacted through the at least one aperture of the cup base.

The interior of at least one valve housing cup communicates expedientlywith an aeration channel extending through the channel plate, which isconnected in actuation of the rotary drive device to an externalpressure source, in particular a compressed air source. In this way, allcontrol valves arranged in the respective valve housing cups aresupplied simultaneously with a fluidic pressure medium. Such a valvehousing cup can also be referred to as an aeration cup.

The interior of at least one further valve housing cup is expediently influidic communication with a deaeration channel extending through thechannel plate, which is connected to a pressure sink, in particular tothe surroundings. In this way, all control valves arranged in therespective valve housing cup receiving cup are connected to the pressuresink and can perform the deaeration of the associated drive chamber ofthe fluid-operated rotary drive.

The at least one electrically actuatable control valve is preferably anelectrically controllable piezoelectric valve. In particular, eachpiezoelectric valve has at least one bending transducer as a controlelement which controls the fluid flow to and from the drive chambers.One and the same piezoelectric valve can have only one single controlelement or also a plurality of control elements, whereby the latteroffer the possibility of either controlling high flow rates in parallelactuation or else of using each control element for controlling one ofthe two drive chambers.

Each piezoelectric valve equipped with a bending transducer expedientlyhas a longitudinal shape and is preferably arranged such that thelongitudinal axes of all the existing piezoelectric valves are alignedparallel to the main axis of the rotary drive.

The design of the control valves as piezoelectric valves offers in asimple way the advantageous possibility of realising a proportionalfluid control behaviour. The free flow cross-section supplied with thecompressed air or another fluidic pressure medium for flow through canbe adjusted very easily in this case by continuous variation of thedrive voltage.

In particular, if at least one electrically actuatable control valve ofthe control valve set-up is designed as a piezoelectric valve, it isadvantageous if the electronic control unit has a high-voltage stagewhich is designed to provide the high-voltage drive voltage required forthe actuation of the control valve arrangement. The high-voltage stageis thus also a component of the drive assembly.

As an alternative to a piezoelectric type, the control valve arrangementcan also be of an electromagnetic type. Mixed forms of these two typesare also possible.

It is advantageous if the drive assembly comprises an encoder designedas a further component for the detection of the rotation angle of thedrive unit. The encoder provides rotational position signals withrespect to the rotational position of the drive unit, which can be usedas the basis for the rotational angular positioning of the drive unitwith respect to the drive housing of the rotary drive. The encoder isexpediently connected to the abovementioned electronic control unit,which is designed in this case to evaluate and process the encodersignals.

The encoder expediently comprises a movable encoder unit arrangednon-rotatably on the drive shaft and thus copying the rotationalmovement of the drive shaft, and a stationary encoder unit cooperatingcontactlessly with this movable encoder unit and fixed to the valvecarrier device. The electronic control unit is in this case electricallyconnected to the fixed encoder unit.

Expediently, the electronic control unit includes a circuit boardpopulated with electronic components, which extends in a planeperpendicular to the main axis and which has a central aperturepenetrated by the encoder.

The electronic control unit of the drive assembly is preferably equippedwith an electronic interface device, which allows the connection of, inparticular, a serial bus system connected to a superordinate electroniccontrol device. This superordinate electronic control device is not acomponent of the drive assembly and is arranged away from it. Thesuperordinate electronic control device is able to coordinate theoperation of the fluid-operated rotary drive with other equipment, forexample, with one or more other fluid-operated rotary drives. In thelatter case, it is particularly advantageous if a plurality of rotarydrive devices are integrated as arm joints in a robot arm of a robot.

The rotary drive device can be operated in particular with any serialbus system, for example with a so-called “CAN Bus” or with a so-calledEthernet.

The rotational angular positioning of the drive unit is expedientlycarried out on the basis of a pressure regulation of the fluid pressureprevailing in the two drive chambers. For this purpose, it isadvantageous if a pressure detecting device is arranged on the rotarydrive, which is also a component of the drive assembly and which candetect the fluid pressure prevailing in the drive chambers via thepressure detecting channels opening into the two drive chambers. Thepressure detecting device is electrically connected to the electroniccontrol unit, to which the detected pressure signals are supplied andwhich is able to perform the desired pressure regulation on the basis ofan algorithm stored in a pressure regulation unit of the electroniccontrol unit.

The control fluid channel system which establishes the connectionbetween the drive chambers and the control valve arrangement ispreferably formed in its entirety in the interior of the drive assemblywithout the use of hoselines and pipelines. This results in particularlycompact dimensions while avoiding damage to the control fluid channelsystem by external mechanical influences.

Expediently, each control valve of the control valve arrangement isarranged at least partially in the region of the peripheral outercircumferential surface of the drive housing of the rotary drive whichpoints radially outward with respect to the main axis. If the controlvalve arrangement contains a plurality of control valves, these severalcontrol valves are placed, in particular in mutually identical manner,in the region of the peripheral outer circumferential surface of thedrive housing.

A robot arm according to the invention is expediently a component of arobot and is equipped with a sufficient number of arm joints, which ineach case connect two arm members of the robot arm in a pivotablemanner. Each arm joint is formed by a rotary drive device of the typementioned above in various manifestations, such that the articulated armmembers are pivotably positionable relative to one another and areangularly positionable relative to one another in anapplication-specific manner. At the free end of the robot arm sits anend effector positionable by actuation of the robot arm, for example, agripping device actuatable electrically or by fluid force. Both on thedrive section and on the drive housing of the rotary drive there is amounting interface for mounting of one of the connecting arm membersarticulated by an arm joint. The driving force for pivoting thearticulated arm members is a fluid force provided by the fluidicpressure medium, in particular compressed air, used to actuate the fluidactuated rotary drive.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention is explained in more detail below with reference to theattached drawing, in which:

FIG. 1 shows a preferred embodiment of the rotary drive device accordingto the invention in a perspective rear view,

FIG. 2 shows the rotary drive device from FIG. 1 in a furtherperspective view from a different viewing angle, whereby the endsections of two arm members of a robot arm are indicated in dot-dashedlines, which are fastened to the rotary drive device for forming a robotarm,

FIG. 3 shows a longitudinal cross section of the rotary drive device soaccording to section line III-III from FIG. 5,

FIG. 4 shows a further longitudinal cross section of the rotary drivedevice according to section line IV-IV from FIG. 5,

FIG. 5 shows a cross section of the rotary drive device according tosection line V-V of FIG. 1,

FIG. 6 shows a further cross section of the rotary drive deviceaccording to section line VI-VI from FIG. 1 and

FIG. 7 shows an isometrically exploded view of the rotary drive devicefrom FIGS. 1 to 6.

DETAILED DESCRIPTION

The figures show a section of a robot arm generally designated byreference numeral 1. The robot arm 1 has a plurality of arm members 2 a,2 b, indicated only by dot-dashed lines, which are always connected inpairs by an arm joint 3 of the robot arm 1. The arm joint 3 is formed bya rotary drive device 4 which is shown in most of the figures of thedrawing without the arm members 2 a, 2 b.

The use of the rotary drive device 4 as an arm joint 3 in a robot arm 1is particularly advantageous, but in no way represents the onlypossibility of use for the rotary drive device 4. The same can be usedfor any arbitrary application that involves rotating and/or rotationalangular positioning of two components relative to one another. Forexample, the rotary drive device 4 can be used for rotating and/orrotationally positioning two machine parts of a production plant or apackaging machine. This list is not exhaustive.

The rotary drive device 4 includes a fluid operated rotary actuator 5.It is operated using a pressurised drive fluid, which may be liquid orgaseous, and which is preferably compressed air. The description of thepreferred embodiment is based on an operation with compressed air.

The rotary drive 5 has a longitudinal extension with a centrallongitudinal axis represented below as the main axis 6.

The rotary drive 5 has a drive housing 7, in which a housing interior 8is formed. The main axis 6 forms the centre of the housing interior 8.The housing interior 8 is delimited radially outside by a side wall 12of the drive housing 7 extending peripherally around the main axis 6,which expediently has a circular cylindrical outer contour.

The housing interior 8 is expediently designed circular cylindricallyand arranged coaxially to the main axis 6.

The housing interior 8 is delimited at the two opposite end faces on theone hand by a front end wall 13 and on the other hand by a rear end wall14 of the drive housing 7. By way of example, the peripheral side wall12 is integrally formed with the rear end wall 14, so that a cup-likestructure results, while the front end wall 13 is in this respectseparately formed and secured by fixing screws or other fastening meansto the peripheral side wall 12.

The drive housing 7 has an axial front side 15 arranged in front of theend wall 13 and an axial rear side 16 which is opposite to the rear endwall 14 relating thereto.

A drive shaft 17 of the rotary drive 5 extends coaxially through thedrive housing 7, whereby the longitudinal axis of the drive shaft 17coincides with the main axis 6. The drive shaft 17 is rotatable relativeto the drive housing 7 about the main axis 6 as a rotation axis, wherebya bearing device 18 is in each case provided for pivotal mounting on thetwo end walls 13, 14, which is in particular a rolling contact bearingdevice. The drive shaft 17 is supported in a smoothly rotatable positionby the bearing device 18 and at the same time is supported in a radialand axial direction in relation to the main axis 6 relative to the drivehousing 7.

The drive shaft 17 is part of a drive unit 22, of which a pivot piston23 arranged in the housing interior 8 is also a part. The pivot piston23 is non-rotatably connected to the drive shaft 17, for example bybeing attached with an internal toothing on an outer toothing of thedrive shaft 17, as can be seen in FIG. 5.

Assisted by the pivot piston 23, the housing interior 8 is subdividedinto a first drive chamber 24 and a second drive chamber 25 in afluid-tight manner. A first working channel A opens into the first drivechamber 24, and a second working channel B opens into the second drivechamber 25, each with an inner channel entrance 26.

Preferably, the two inner channel entrances 26 are arranged on the rearend wall 14, which is penetrated by the two working channels A, B inparticular in the axial direction.

A controlled fluid admission flow of the two drive chambers 24, 25 andthus of the pivot piston 23 with the drive fluid is possible through theworking channels A, B, in order to cause a rotative drive movement 27 ofthe drive unit 22 about the main axis 6 as a rotation axis, indicated bya double arrow. The direction of rotation is predetermined by thepressure difference existing between the two drive chambers 24, 25. Bysetting an equally high pressure, the drive unit 22 can be heldnon-rotatably relative to the drive housing 7 in any arbitraryrotational position.

The drive movement 27 can be tapped on a drive section 17 a of the driveshaft 17, which projects from the drive housing 7 on the axial frontside 15.

On the drive section 17 a, a first mounting interface 28 a is arranged,on which a component to be moved rotatively can be fixed. By way ofexample, one arm member 2 a of the two arm members 2 a, 2 b is attachedto the first mounting interface 28 a.

The first mounting interface 28 a may be formed directly on the driveshaft 17, but is preferably part of a separate interface body 29 whichis attached to the drive section 17 a, for example by a screwconnection.

The drive movement 27 is limited to a rotation angle which is smallerthan 360 degrees. The maximum rotation angle is for example 270 degrees.The drive movement 27 can optionally be oriented both clockwise andcounterclockwise.

In order to generate the torque which causes the drive movement 27, thepivot piston 23 has a wing section 23 a, which protrudes on one sidefrom the drive shaft 17 in a radial direction relative to the main axis6. The pivot piston 23 preferably also has a bushing section 23 b, whichis coaxially penetrated by the drive shaft 17 and is fixed non-rotatablyon the drive shaft 17 in the manner described above. The pivot piston 23is provided on its outer surface with at least one seal 23 c, whichslidably abuts under seal against the inner surface of the drive housing7 bounding the housing interior 8.

The section of the seal 23 c extending in the housing interior 8 next tothe wing section 23 a along the radial outer circumference of thebushing section 23 b is slidably in sealing contact with a partitionwall element 32 which is fixed in the housing interior 8 with a radialdistance from the main axis 6. The partition wall element 32 issurrounded by a partition wall seal 32 a, which sealingly abuts not onlythe seal 23 c of the pivot piston 23 but also the radial innercircumferential surface 12 a of the peripheral side wall 12 and theaxial inner surface of the two end walls 13, 14. In this way, thepartition wall element 32 and the pivot piston 23 jointly delimit thetwo drive chambers 24, 25, which are partial chambers of the housinginterior 8.

The pivot piston 23 can be driven by a controlled fluid admission flowof the two drive chambers 24, 25 to a pivoting movement 33 visualised bya double arrow with the main axis 6 as a pivot axis, from which thedrive movement 27 directly results, which can be picked up at the drivesection 17 a.

The partition wall element 32 expediently also functions as a stopelement for specifying a maximum pivot angle of the pivot piston 23. Forthis purpose, the partition wall element 32 has abutment sections 34projecting on both sides of the partition wall seal 32 a in thecircumferential direction of the main axis 6, which are oriented in thedirection of the pivoting movement 33 and against which the pivot piston23 with its wing section 23 a can impinge in order to specify twoopposite end positions of the pivotal movement 33. A maximum pivot angleof the pivot piston 23 is mechanically predetermined by the abutmentsection 34, which is smaller than 360 degrees.

For fastening the other arm member 2 b of the two arm members 2 a, 2 b,a second mounting interface 28 b is formed on the outside of the drivehousing 7, in particular on the outside of the peripheral side wall 12.The same comprises in the embodiment a plurality of mounting holes forscrew mounting the respective arm member 2 b.

In another application of the rotary drive device 4, any arbitrarymachine part may be attached to the second mounting interface 28 b.

For controlled fluid admission flow of the two drive chambers 24, 25,the rotary drive device 4 is equipped with an electrically actuatablecontrol valve arrangement 35. This control valve arrangement 35comprises at least one electrically actuatable control valve 36, wherebyit is expedient if the control valve arrangement 35 has a plurality ofso such electrically actuatable control valves 36, as apply to theillustrated embodiment.

The control valve arrangement 35 is fluidically connected to the twodrive chambers 24, 25 via a control fluid channel system 37, theessential components of which are apparent in particular from FIG. 6.The two working channels A, B belong to the control fluid channel system37 and each form a channel end section of the control fluid channelsystem 37.

The control valve arrangement 35 is capable of controlling, on the onehand, the aeration and, on the other hand, the deaeration of each drivechamber 24, 25. During aeration, a supply of drive fluid into therespective drive chamber 24, 25 takes place, during deaeration, drivefluid is discharged from the respective drive chamber 24, 25 fordepressurisation.

The control valve arrangement 35 is also connected via at least oneaeration channel 38 to an aeration connection 38 a. In addition, it isconnected via at least one deaeration channel 39 to a deaerationconnection 39 a. The aeration connection 38 a and the deaerationconnection 39 a are located on the outside of the rotary drive device 4,whereby the aeration connection 38 a enables a fluidic communicationwith a pressure source P, in particular designed as a compressed airsource, and the deaeration connection 39 a enables a fluidiccommunication to a pressure sink R, in particular formed by thesurroundings.

The two connections 38 a, 39 a are expediently equipped with hoseconnection devices, each of which enables the releasable connection of afluid hose leading to the pressure source P or to the pressure sink R,respectively. By way of example, the connections 38 a, 39 a are orientedperpendicular to the main axis 6.

The control valve arrangement 35 is mounted on the drive housing 7 ofthe rotary drive 5 and combined in this way with the rotary drive 5 toform an in particular self-supporting drive assembly 42 which can behandled as a single unit.

Expediently, the drive assembly 42 also comprises a valve carrier device43 to which the control valve arrangement 35 is preferably solelyattached and by which the control valve arrangement 35 is fixed to thedrive housing 7 of the rotary drive 5.

Preferably, each control valve 36 is attached to the valve carrierdevice 43, so that it is supported by the same and is fixed stationarilywith respect to the drive housing 7 by means of the valve carrier device43.

It has proved to be particularly advantageous if the valve carrierdevice 43 has a channel plate 44 penetrated by the control fluid channelsystem 37 and preferably also by the aeration channel 38 and thedeaeration channel 39, to which the control valve arrangement 35 isfastened independently of the drive housing 7.

The channel plate 44 is arranged on the axial rear side 16 of the drivehousing 7 and oriented in such a way that its panel plane projectsperpendicular to the main axis 6.

The channel plate 44 has one or more edge sections 45 radiallyprojecting beyond the drive housing 7, to each of which at least one ofthe plurality of control valves 36 is attached so as to be fluidlyconnected to the control fluid channel system 37 in the channel plate44.

According to a preferred exemplary embodiment realised in theillustrated embodiment, the valve carrier device 43 comprises aplurality of cup-shaped structures designated as valve housing cups 46which are respectively fixed to one of the edge sections 45 of thechannel plate 44 and in which at least one of the control valves 36 isincorporated.

Each valve housing cup 46 has a mounting flange 48 at a first axial endsection 47 a, with which it is attached under seal to the front end faceof the edge section 45 pointing towards the axial front side 15 and issecured by means of fixing screws 49 or other fastening means on thechannel plate 44, in particular in a detachable manner. The valvehousing cup 46 is frontally intrinsically open at the first axial endsection 47 a and closed in the assembled state by the edge section 45 ofthe channel plate 44.

Each valve housing cup 46 projects away from the channel plate 44 in afinger-like manner toward the axial front side 15 and terminates freelywith a second axial end section 47 b opposite the channel plate 44. Atthis second axial end section 47 b, the valve housing cup 46, which isopen at the first axial end section 47 a, has a cup base 52.

Each control valve 36 is supported by a second axial end section 53 b onthe inner surface of the cup base 52 and is thereby pressed against thechannel plate 44 with its opposite first end section 53 a. In this way,each control valve 36 is immovably fixed to the valve carrier device 43in the axial direction of the main axis 6.

Expediently, the cup base 52 is provided with one or more apertures 59through which electrical connection contacts of each control valve 36protrude, which are contacted with a printed circuit board 54 attachedto the outside of the cup base 52.

Each printed circuit board 54 is designed with at least oneelectromechanical interface device 54 a, which is designed to supplyelectrical control signals for the operational control of the controlvalves 36.

Each control valve 36 has in particular frontally at its first axial endsection 53 a one or more controllable valve openings 55 whichcommunicate with the control fluid channel system 37 running in thechannel plate 44 via a respective connecting channel 56 opening out atthe rear end face of the edge section 45.

In addition, the interior 57 of at least one valve housing cup 46hereinafter referred to as aeration cup 46 a is connected via anaeration opening 38 b with the aeration channel 38 running in thechannel plate 44, and the interior 57 of at least one valve housing cup46 hereinafter referred to as a deaeration cup 46 b is also connectedvia a deaeration opening 39 b with the deaeration channel 39 running inthe channel plate 44. The aeration opening 38 b and the deaerationopening 39 b respectively open in the region of the open first axial endsection 47 a of a valve housing cup 46 on the end face of the channelplate 44 facing the axial front side 15 and thus are in directcommunication with the interior 57.

The rotary drive device 4 of the preferred illustrated embodimentcomprises an aeration cup 46 a and two deaeration cups 46 b. This numbermay vary, whereby however there is at least one of each type of cup.

The interior 57 of each valve housing cup 46 is in continuous fluidiccommunication with the interior 58 of each control valve 36 arrangedtherein. Each control valve 36 has in its interior 58 at least onecontrol element 62 movable by electrical activation, which acts on amovable valve member 62 a or forms the same directly. By appropriateelectrical control, the position of the control element 62 and thus theposition of the valve member 62 a can be changed in order to eitherclose an associated controllable valve opening 55 or to enable a fluidpassage.

Thus, each control valve 36 is able to separate the working channel A orB, connected to it via the control fluid channel system 37, from theinterior space 57 of the associated valve housing cup 46 or to connectwith this interior 57, in this way, depending on whether it is anaeration cup 46 a or an deaeration cup 46 b, it is able to either aerateor deaerate the associated working channel A or B and thus the connecteddrive chamber 24, 25, or to shut this off for blocking the drive fluidtherein.

It is possible to connect the several control valves 36 contained in onand the same valve housing cup 46 to the same working channel A or B byappropriate design of the control fluid channel system 37, or to connectthe one control valve 36 to the first working channel A and the othercontrol valve 36 to the second working channel B. The correspondingselection is made in particular as a function of the flow rate to bemanaged.

The channel plate 44 is expediently subdivided in a joining plane 63,which is perpendicular to the main axis 6, into two first and secondchannel plate bodies 44 a, 44 b, each plate-shaped. The control fluidchannel system 37 extends in the joining plane 63 and is formed bygroove-shaped recesses formed in one and/or the other channel plate body44 a, 44 b, which are sealed to the surroundings by the other channelplate body 44 b, 44 a with the interposition of a sealing mask 64.

The aeration connection 38 a and the deaeration connection 39 a areexpediently formed together in a pneumatic connection unit 65, which isarranged in the region of the axial rear side 16 of the drive housing 7and which is expediently also a component of the drive assembly 42. Itconsists for example of a block-shaped body, which is penetrated by theaeration channel 38 and the deaeration channel 39 and which is attachedto the channel plate 44, such that both the aeration channel 38 and thedeaeration channel 39 in the channel plate 44 continue to be constantlyfluidically connected to at least one of the interiors 57 of the valvehousing cup 46.

The term “pneumatic” in the pneumatic connection unit 65 is to beunderstood as representative of use with any type of pressurised fluidand is not limited to compressed air. This is merely to express that theconnection unit 65 forms a fluidic interface, at which the drive fluidis fed into the rotary drive device 4 or discharged therefrom.

The pneumatic connection unit 65 is formed integrally with the channelplate 44 and in particular with one of the two channel plate bodies 44a, 44 b in a non-illustrated embodiment.

It is considered particularly advantageous if the pneumatic connectionunit 65 is a separate component with respect to the valve carrier device43, which applies to the illustrated embodiment.

By way of example, the pneumatic connection unit 65 is integrated,relative to the axial direction of the main axis 6, between the rear endwall 14 of the drive housing 7 and the channel plate 44 of the valvecarrier device 43. This has the advantage that the rear side 66, whichis axially averted away from the rotary drive 5 of the valve carrierdevice 43 and in particular of the channel plate 44, is available forthe attachment of other components of the drive assembly 42. Inprinciple, it would certainly be possible to mount the valve carrierdevice 43 directly to the drive housing 7 and to arrange the pneumaticconnection unit 65 on the rear side 66 of the valve carrier device 43.

The control fluid channel system 37, which connects the two drivechambers 24, 25 to the control valve arrangement 35, is expedientlyformed in its entirety within the drive assembly 42 without hoselines orpipelines being involved. This prevents damage and facilitates externalcleaning. In addition, the drive assembly 42 can be assembled in thisway during its manufacture quickly and error-free.

Each control valve 36 of the control valve arrangement 35 is expedientlyarranged at least partially in the region of the peripheral outercircumferential surface 67 of the drive housing 7 which points radiallyoutward with respect to the main axis 6. Preferably, the control valves36 each extend at least partially along the peripheral side wall 12.

Due to the pneumatic connection unit 65 integrated between the valvecarrier device 43 and the drive housing 7, the channel plate 44 isarranged at an axial distance from the drive housing 7. The controlvalves 36 projecting from the channel plate 44 toward the axial frontside 15 thus have a longitudinal section associated with their firstaxial end section 53 a, which extends along the axial distance betweenthe channel plate 44 and the drive housing 7 and to which a furtherlongitudinal section of the control valve 36 connects, which extendsfrom the axial rear side 16 axially along the radial outercircumferential surface 67 of the drive housing 7, whereby the controlvalve 36, however, ends at an axial distance in front of the axial frontside 15 of the drive housing 7.

Thus, there is a configuration in which each control valve 36 projectsbeyond the axial rear side 16 of the drive housing 7, but at the sametime the drive housing 7 projects beyond the control valves 36 in theregion of its axial front side 15.

The aforementioned embodiments relating to the control valves 36 applyin accordance for the valve housing cup 46 accommodating the controlvalves 36.

According to an embodiment not illustrated, the control valves 36 extendover the entire axial length of at least the peripheral side wall 12 ofthe drive housing 7 and in particular of the entire drive housing 7.

The control valves 36 are arranged so that there is only a very smallradial distance to the peripheral side wall 12. As a result, the driveassembly 42 has very small transverse dimensions.

According to an embodiment not illustrated, the control valves 36 aredisplaced axially back relative to the drive housing 7 so that they donot overlap the peripheral side wall 12 of the drive housing 7 at all.

The described arrangement of the control valves 36 can be realisedparticularly advantageously in conjunction with control valves 36, whichare designed as piezoelectric valves 36 a, which applies to theillustrated embodiment.

The piezoelectric valves 36 a have a longitudinal shape and are alignedso that their respective longitudinal axis 69 is parallel to the mainaxis 6.

Each piezoelectric valve 36 a comprises at least one lamellar controlelement 62, which is designed as a bending transducer 62 b, which isdeflectable according to the reverse piezoelectric effect for openingand closing an associated controllable valve opening 55, if it iselectrically controlled with a corresponding drive voltage.

Each bending transducer 62 b expediently extends in the longitudinaldirection of the drive housing 7.

At least some, but preferably all control valves 36 of the control valvedevice 35 are preferably designed so that they are independentlyelectrically actuatable.

The control valves 36 of the control valve arrangement 35 are preferablyarranged distributed around the main axis 6. With reference to a medialplane containing the main axis 6, it is expedient to provide that the atleast one aeration cup 46 a is placed on one side and the at least onedeaeration cup 46 b is placed on the other side of this medial plane.

As can be clearly seen in particular from FIG. 3, the valve carrierdevice 43 is preferably fixed to the drive housing 7 by means of fixingscrews 68. The fixing screws 68 exemplarily pass through the channelplate 44, on which they are supported with their screw heads, wherebythey are screwed with their threaded shaft into each internal thread,which is formed in the rear end wall 14 of the drive housing 7.

With the same fixing screws 68, the pneumatic connection unit 65 isexpediently attached. The fixing screws 68 pass through the pneumaticconnection unit 65 provided with corresponding through holes, so thatthe same is clamped between the drive housing 7 and the channel plate 44of the valve carrier device 43.

If the channel plate 44 is composed of a plurality of adjoining channelplate bodies 44 a, 44 b, these two channel plate bodies 44 a, 44 b areexpediently clamped together axially by the fixing screws 68.

In this way, there is a modular design that favours the manufacture andassembly of the individual components of the drive assembly 42.

Expediently, the drive assembly 42 also contains, as a furthermodule-like component, an electronic control unit 72 which iselectrically connected to the control valve arrangement 35 for itselectrical actuation.

The electronic control unit 72 is preferably arranged in the region ofthe axial rear side 16 of the drive housing 7. If the drive assembly 42comprises a valve carrier device 43, which applies to the illustratedexemplary embodiment, the electronic control unit 72 is preferablyplaced on the rear side 66 of the valve carrier device 43.

The electronic control unit 72 is expediently attached directly to thevalve carrier device 43, independently of the drive housing 7. It cantherefore be mounted and demounted if necessary, without also having torelease the valve carrier device 43 from the rotary drive 5.

The preferably detachable fastening of the electronic control unit 72 tothe valve carrier device 43 is effected in particular by means of aplurality of stud bolts 73 with an external thread, which are anchoredin the channel plate 44, and thereby expediently in the second channelplate body 44 b, and protrude backwards away from the drive housing 7over the valve carrier device 43. On these stud bolts 73, the electroniccontrol unit 72 is attached and fixed by means of fastening nuts 74screwed onto the stud bolts 73.

The fixing of the electronic control unit 72 is expediently carried outon a printed circuit board 75 of the electronic control unit 72, whichhas fastening holes through which the stud bolts 73 protrude. Thecircuit board 75 is oriented so that the circuit board plane extendsperpendicular to the main axis 6.

The electronic control unit 72 is connected to the electromechanicalinterface devices 54 a via a first electrical conductor arrangement 76,indicated by dot-dashed lines, which is realised in particular in theform of electric cables, in order to provide the electrical connectionbetween the electronic control unit 72 and the control valve arrangement35, which enables an electrical activation.

The electronic control unit 72 is able to generate at least onevariable-level electrical drive voltage, which is communicated as acontrol signal to the control valve arrangement 35 to operate thecontrol valves 36 as required.

In particular, when the control valves 36 are designed as piezoelectricvalves 36 a, it is advantageous if the electronic control unit 72 has ahigh-voltage stage 77, by means of which a high-voltage drive voltagesuitable for controlling the bending transducers 62 b can be generated.The high-voltage stage 77 is thus also an integral part of the driveassembly 42.

The electronic control unit 72 is designed to enable coordination withrespect to its operation with other electrically actuatable devices, inparticular with other rotary drive devices 4 used as arm joints 3. Forthis purpose, it is equipped with an electromechanical interface device78 to which a serial bus system 82 is connected or connectable, whichestablishes a control-technical connection with a superordinate externalelectronic control device 83, for example by means of electrical cables.

The bus system can alternatively also be designed for parallel signaltransmission with a 1:1 wiring.

The electromechanical interface device 78 is designed in particular suchthat serial bus signals can be looped through in accordance with arrow84 in order to make a connection with a further device to be controlled.

The serial bus system 82 may operate on any arbitrary bus protocol. Theelectronic control unit 72 is designed, for example, to be able toconnect a so-called CAN bus or a so-called IO-Link bus communicationsystem.

Expediently, the rotary drive device 4 is provided with an encoder 85,that is, in other words, a rotary encoder which is designed to detectand evaluate the instantaneous rotation angle between the rotativelymovable drive unit 22 and the drive housing 7. In this way, a detectionof the instantaneous relative rotational position between the drive unit22 and the drive housing 7 is possible. When used as an arm joint 3 of arobot arm 1, the instantaneous relative pivoting position between thetwo arm members 2 a, 2 b can be detected in this way.

Via a second electrical conductor arrangement 86, indicated bydot-dashed lines, the encoder 85 is suitably connected to the internalelectronic control unit 72 of the rotary drive device 4, which isdesigned to command the electrical control of the control valvearrangement 35 on the basis of the electrical output signals of theencoder 85.

The encoder 85 is preferably designed as an incremental encoder. Theencoder 85 can be implemented as an absolute value encoder or as arelative value encoder.

Preferably, the encoder 85 is arranged on the axial rear side 16 of thedrive housing 7. If the rotary drive device 4 has a valve carrier device43 attached to the rear of the drive housing, the encoder 85 isexpediently arranged on its axial rear side 66. The latter applies tothe embodiment.

The drive shaft 17 expediently has an end section 17 b axially oppositethe drive section 17 a, which passes through the rear end wall 14 of thedrive housing 7 and projects on the axial rear side 16 of the drivehousing 7. This rear end section 17 b defines a detection section 87 fora rotary drive device 4 equipped with an encoder 85, which isoperatively connected to the encoder 85. The detection section 87 isexemplified by the free end section of the rear end section 17 b of thedrive shaft 17.

At this detection section 87, a movable encoder unit 85 a isnon-rotatably mounted, which participates in the rotative drive movement27 of the drive unit 22. This movable encoder unit 85 a cooperatescontactlessly in a conventional manner with an encoder unit 85 battached in a fixed location relative to the drive housing 7, which isexemplarily mounted on the valve carrier device 43 and in particular onthe rear side of the channel plate 44. The fixed encoder unit 85 b isconnected to the electronic control unit 72 via the above-mentionedsecond electrical conductor arrangement 86.

The encoder 85 is expediently arranged coaxially with respect to thedrive shaft 17. It can be optimally integrated into the drive assembly42, if the circuit board 75 of the electronic control unit 72 has acentral aperture 88 in which the encoder 85 extends and which ispenetrated in particular by the encoder 85. The aperture 88 ispreferably circular. The encoder 85 can thus be arranged in a commonplane with the electronic control unit 72, whereby this common planeprojects perpendicular to the main axis 6.

Preferably, the electronic control unit 72 also has a main plane ofexpansion perpendicular to the main axis 6, such as the channel plate 44of the valve carrier device 43. This gives the drive assembly 42particularly short length dimensions.

The fluid-operated rotary drive device 4 is preferably equipped with apressure detecting device 91, which is designed to detect the fluidpressure currently prevailing in each of the two drive chambers 24, 25.The detected pressure values are used in particular for carrying out apressure regulation, with the aid of which the rotary drive movement 27including the rotative positioning of the drive unit 22 can be carriedout or is carried out.

The pressure detecting device 91 is expediently arranged on the rotarydrive 5. As can be seen in particular from FIG. 5, the detection of thefluid pressure prevailing in the drive chambers 24, 25 takes placethrough a pressure detection channel 92 a, 92 b, by which a firstpressure detection channel 92 a opens out into the first drive chamber24 via a first inner channel entrance 93 a and a second pressuredetection channel 92 b opens out into the second drive chamber 25 via asecond inner channel entrance 93 b.

Preferably, the pressure detecting channels 92 a, 92 b are not formed bythe working channels A, B, but are formed as separate fluid channels inthis regard and thus also with respect to the control fluid channelsystem 37. This allows a particularly reliable pressure detection, whichis independent of pulse-like pressure fluctuations that can occur in theworking channels A, B in particular when the control valves 36 switchbetween an aeration process and a deaeration process.

In the illustrated preferred embodiment, the pressure detecting channels92 a, 92 b penetrated the peripheral side wall 12 of the drive housing7, so that the inner channel entrances 93 a, 93 b are located on theexemplary circular cylindrical radial inner peripheral surface 12 a ofthe peripheral side wall 12 enclosing the housing interior 8.

The pressure detecting device 91 is preferably arranged on the radialouter circumferential surface 12 b of the peripheral side wall 12 facingaway from the main axis 6.

The pressure detecting device 91 expediently emerges from the outside ofthe peripheral side wall 12, with a pressure pickup connection 94 ineach pressure detection channel 92 a, 92 b. On the end face of thepressure pickup connection 94 is in each case a pressure pickup aperturefor the prevailing fluid pressure in the associated drive chamber 24,25. In this way, the pressure detection takes place practicallyimmediately in the respective drive chamber 24, 25, which entails a highpressure detection accuracy.

The pressure detecting device 91 expediently contains a separatepressure sensor for each drive chamber 24, 25, so that a first pressuresensor 95 a is associated with the first drive chamber 24 and a secondpressure sensor 95 b is associated with the second drive chamber 25.Each pressure sensor 95 a, 95 b has one of the pressure pickupconnections 94 and is inserted or plugged from outside the drive housing7 in the associated pressure detection channel 92 a, 92 b. Eachinterposed seal prevents undesirable fluid leakage from the drivechambers 24, 25 to the surroundings.

Preferably, the rotary drive device 4 includes an electronic pressureregulation unit 96, to which the pressure detecting device 91 isconnected via a third electrical conductor arrangement 97 indicated by adot-dashed line. The pressure regulation unit 96 is designed so inparticular as an integral part of the electronic control unit 72.Accordingly, the pressure regulation unit 96 is located in the region ofthe axial rear side 16 of the drive housing 7 and in particular on therear side 66 of the valve carrier device 43.

The previously described electrical conductor arrangements 76, 86, 97are preferably designed as flexible electrical cables which are laid inthe region of the outer circumference of the rotary drive 5.

The pressure detecting device 91 is expediently arranged on a sensorholder 98 mounted radially on the outside of the drive housing 7. Thesensor holder 98 is attached to the radial outer circumferential surface12 b of the peripheral side wall 12 and fixed there in particular byfixing screws. In the sensor holder 98, which is preferably made ofplastic material, a receiving section 99 is preferably formed for eachpressure sensor 95 a, 95 b, which receives and holds the associatedpressure sensor 95 a, 95 b. The pressure sensors 95 a, 95 b areexpediently combined with the sensor holder 98 to form an assembly thatcan be handled as a single unit when it is mounted on the rotary drive5.

As can be clearly seen in particular from FIG. 4, both the inner channelentrances 26 of the two working channels A, B and the inner channelentrances 93 a, 93 b of the two pressure detecting channels 92 a, 92 bare placed in the housing interior 8 in such a way that they are outsidethe pivoting range, which is passed over by the wing section 23 a of thepivot piston 23 during its pivoting movement 33. These inner channelentrances 26, 93 a, 93 b are located correctly on the same side and theother side of the partition wall seal 32 a, immediately adjacent to thepartition wall element 32.

Each of the two inner channel entrances 93 a, 93 b of the pressuredetecting channels 92 a, 92 b is expediently located in a region, pastwhich one of the two abutment sections 34 extends. Each abutment section34, together with the radially adjacent circumferential section of theperipheral side wall 12, delimits a section of the associated drivechamber 24, 25, into which one of the pressure detecting channels 92 a,92 b opens out, in order to act as a pressure pickup section 100 inwhich pressure sensing occurs. Since the abutment sections 34 do notinteract sealingly with the wall of the drive housing 7, the abutmentsections 34 are surrounded by the drive fluid located in the respectiveassociated drive chamber 24, 25, which consequently is also present inthe pressure pickup sections 100.

Preferably, the inner channel entrances 26 of the working channels A, Blie in the circumferential direction of the main axis 6 in the same areaas the abutment sections 34, so that they are covered by the same. Sincethe abutment sections 34 are arranged at an axial distance from theaxial end walls 13, 14 of the housing interior 8, a gap is howeverprovided which allows unimpeded inflow and outflow of the drive fluidpreferably in the form of compressed air.

In FIGS. 5 and 6, the fluid flow of the drive fluid which is possiblefor actuating the rotary drive 5 is indicated by flow arrows. Dashedflow arrows illustrate the aeration flow, dotted flow arrows illustratethe deaeration flow.

The pressure regulation unit 96 is designed to adjust the pressuredifference prevailing in the two drive chambers 24, 25 so that the driveunit 22 performs a desired drive movement 27 and/or is positioned andheld in a desired rotational position with respect to the drive housing7. The rotational speed can be influenced by the level of the setpressure difference. At the same level of pressure in the two drivechambers 24, 25, the rigidity of the system can be predetermined by theextent of the pressure level. The encoder 85 provides instantaneousrotation angle information that is processed during pressure regulation.

The rotational positioning of the drive unit 25, which ispressure-controlled in this manner, expediently takes place in theinternal electronic control unit 72 of the rotary drive device 4,whereby the target values are however expediently predetermined by thesuperordinate electronic control device 83. In this way, an optimalcoordination of several rotary drive devices 4 communicating for controlpurposes with the same superordinate control device 83 is possible.

It is advantageous if the pneumatic connection unit 65 is equipped witha further pressure detecting device 101, which is indicated onlyschematically by dot-dashed lines in the drawing and which is designedto detect the fluid pressure, which is present at the aerationconnection 38 a and/or at the deaeration connection 38 b. With the helpof the pressure values thus acquired, in particular diagnostic functionsare possible, for example, verifications as to whether a sufficientlylarge supply pressure is present and/or whether so perfect,backflow-free fluid discharge is ensured. In addition, for example, thedetection of the pressure gradient of the valve characteristic ispossible.

The further pressure detecting device 101 is expediently connected tothe electronic control unit 72 via a fourth electrical conductorarrangement 102.

As can be seen in particular from FIG. 4, the drive shaft 17, with itsrear end section 17 b projecting from the drive housing 7 on the axialrear side 16, passes through both the pneumatic connection unit 65 andthe channel plate 44 of the valve carrier device 43 in a rotatablemanner relating thereto.

The drive shaft 17 is expediently traversed in its longitudinaldirection by two fluid channels designated as shaft channels 103 fordifferentiation purposes, which are connected with an annular groove 104formed in the drive shaft 17 in the longitudinal section of the rear endsection 17 b of the drive shaft 17, which projects through the pneumaticconnection unit 65. The longitudinal sections of the aeration channel 38and of the deaeration channel 39 extending through the pneumaticconnection unit 65 each have a branch via which they communicate withone of the two annular grooves 104. In this way, one of the two shaftchannels 103 is constantly connected to the aeration connection 38 a andthe other is constantly connected to the deaeration connection 39 aregardless of the rotational position of the drive shaft 17.

Interface means, not further illustrated in the drawings, are assignedto the shaft channels 103 in the region of the drive section 17 a, towhich further fluid channels can be connected in order to allow afluidic interlinking with, for example, the rotary drive device 4 ofanother arm joint 3. These secondary fluid channels are preferablyformed by elastically bendable fluid hoses. The same can be laidloop-shaped or helically wound in the interface bodies 29.

In the illustrated embodiment, the rotary drive 5 includes only a singledrive stage formed by two drive chambers 24, 25 and a pivot piston 23incorporated therein. According to a not further illustrated embodiment,however, a multi-stage design is possible in which the rotary drive 5has at its disposal a plurality and in particular two axially adjacentpivot pistons 23 which each separate a separate pair of drive chambers24, 25 from one another and are non-rotatably connected with the samedrive shaft 17. With such a design, particularly high torques can begenerated.

What is claimed is:
 1. A rotary drive device comprising: afluid-actuated rotary drive, the fluid-actuated rotary drive having adrive housing and a drive unit rotatable relative thereto about a mainaxis of the rotary drive by a controlled fluid application of at leastone pivot piston arranged in the drive housing, the main axis of therotary drive extending in an axial direction from an axial front side ofthe drive housing to an axial rear side of the drive housing oppositethe axial front side, and wherein a drive shaft of the drive unitconnected to the pivot piston projects from the drive housing at theaxial front side of the drive housing with a drive section enabling aforce output, and wherein the rotary drive is formed as part of a driveassembly that can be handled as a single unit; a valve carrier devicearranged in the axial direction on the axial rear side of the drivehousing, the valve carrier device carrying a control valve arrangementcomprising at least one electrically actuatable control valve, which isfluidically connected via a control fluid channel system to two drivechambers of the rotary drive separated from one another by the pivotpiston in the drive housing, and which is designed to control the fluidpressurization of the two drive chambers for rotation and rotativepositioning of the drive unit relative to the drive housing; a pneumaticconnection unit arranged in the axial direction on the axial rear sideof the drive housing, the pneumatic connection unit having an externallyaccessible aeration connection connectable with an external pressuresource and an externally accessible deaeration connection connectablewith an external pressure sink, wherein the control valve arrangementcarried by the valve carrier device is connected with both the aerationconnection and with the deaeration connection; and an electronic controlunit arranged in the axial direction on the axial rear side of the drivehousing, the electronic control unit being connected electronically withthe control valve arrangement for the electrical control thereof.
 2. Therotary drive device according to claim 1, wherein the pneumaticconnection unit is arranged axially between the drive housing and thevalve carrier device.
 3. The rotary drive device according to claim 1,wherein the valve carrier device is fixed on the drive housing by meansof fixing screws, which penetrate the pneumatic connection unit andthereby also affix the pneumatic connection unit.
 4. The rotary drivedevice according to claim 1, wherein the electronic control unit isarranged on the rear side of the valve carrier device axially oppositethe drive housing and is attached on the valve carrier deviceindependently of the drive housing of the rotary drive.
 5. The rotarydrive device according to claim 1, wherein the valve carrier device hasa channel plate extending in the region of the axial rear side of thedrive housing in a plane perpendicular to the main axis, whereby thecontrol valve arrangement is attached to the channel plate andcommunicates with the control fluid channel system running in thechannel plate.
 6. The rotary drive device according to claim 5, whereinthe valve carrier device has a plurality of valve housing cups, eachincorporating at least one control valve, each of which being fixed witha first axial end section to the end face, which faces the drivehousing, of an edge section of the channel plate which radiallysurpasses the drive housing, wherein the valve housing cups extendfinger-like toward the axial front side of the drive housing, freelyterminating next to the drive housing with their second axial endsection.
 7. The rotary drive device according to claim 6, wherein theinterior of at least one valve housing cup communicates with an aerationchannel passing through the channel plate and provided for connection toan external pressure source, and that the interior of at least onefurther valve housing cup communicates with a deaeration channel passingthrough the channel plate and provided for connection to a pressuresink.
 8. The rotary drive device according to claim 1, wherein the atleast one control valve is designed as an electrically controllablepiezoelectric valve.
 9. The rotary drive device according to claim 8,wherein the piezoelectric valve has at least one bending transducer as acontrol element controlling the fluid flow to and from the drivechambers.
 10. The rotary drive device according to claim 1, wherein theelectronic control unit has a high-voltage stage for generating ahigh-voltage drive voltage for the control valve arrangement.
 11. Therotary drive device according to claim 1, wherein the drive assemblycomprises as a further component an encoder designed to detect therotation angle of the drive unit, which is arranged on the axial rearside of the drive housing of the rotary drive, whereby the encoder has amovable encoder unit arranged on a detection section of the drive shaftprojecting on the axial rear side of the drive housing and a fixedencoder unit attached to the valve carrier device and cooperatingcontactlessly with the movable encoder unit, whereby the fixed encoderunit is electrically connected to the electronic control unit.
 12. Therotary drive device according to claim 11, wherein the electroniccontrol unit has a printed circuit board extending in a planeperpendicular to the main axis and having a central aperture, which ispenetrated by the encoder.
 13. The rotary drive device according toclaim 1, wherein the electronic control unit has an electromechanicalinterface device for connecting a bus system connected to asuperordinate electronic control device.
 14. The rotary drive deviceaccording to claim 13, wherein the bus system is a serial bus system.15. The rotary drive device according to claim 1, wherein the driveassembly as a further component has a pressure detecting device fordetecting the fluid pressure prevailing in the drive chambers, which iselectrically connected to the electronic control unit.
 16. The rotarydrive device according to claim 15, wherein the electronic control unitis equipped with a pressure regulation unit processing the detectedpressures for the rotational position control of the drive unit.
 17. Therotary drive device according to claim 1, wherein the control fluidchannel system is formed in its entirety without the use of hoselinesand pipelines in the interior of the drive assembly.
 18. A robot arm ofa robot, comprising at least two arm members connected to one another bymeans of an arm joint in a relatively pivotable manner, wherein the armjoint is formed by a rotary drive device which comprises afluid-actuated rotary drive, which has a drive housing and a drive unitrotatable relative thereto about a main axis of the rotary drive by acontrolled fluid application of at least one pivot piston arranged inthe drive housing, wherein a drive shaft of the drive unit connected tothe pivot piston projects from the drive housing at an axial front sideof the drive housing with a drive section enabling a force output, andwith a control valve arrangement comprising at least one electricallyactuatable control valve, which is fluidically connected via a controlfluid channel system to two drive chambers of the rotary drive separatedfrom one another by the pivot piston in the drive housing, and which isdesigned to control the fluid pressurization of the two drive chambersfor rotation and rotative positioning of the drive unit relative to thedrive housing, wherein the rotary drive is formed as part of a driveassembly that can be handled as a single unit, which comprises, inaddition to the rotary drive, at least the following components arrangedin axial succession on the axial rear side of the drive housing oppositethe axial front side: a valve carrier device carrying the control valvearrangement; a pneumatic connection unit, which has in an externallyaccessible manner an aeration connection connectable or connected withan external pressure source and a deaeration connection connectable orconnected with an external pressure sink, wherein the control valvearrangement is connected with both the aeration connection and with thedeaeration connection; and an electronic control unit connectedelectronically with the control valve arrangement for the electricalcontrol thereof, wherein the drive section of the drive shaft and thedrive housing of the fluid-operated rotary drive each have a mountinginterface to which one of the arm members of the robot arm is mounted.